Abstract
An electrostatic drive micro cantilever, which has little inertia force and is able to move quickly, is suitable for functional optical devices. However, the cantilever is pulled into the electrode over the specific deflection because the electrostatic force drastically increases and the system falls into unstable state. O avoid the pull in effect and control the deflection and dynamics of the cantilever, we designed a deflection control system based on feedback control technique. It is shown that the pull-in event after relatively short time elapse by using the lumped motion of the cantilever can be avoideded by using the first mode motion
