The Proceedings of Conference of Kansai Branch
Online ISSN : 2424-2756
2005.80
Session ID : 106
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106 Synthesis of high-quality diamond film for electronic device applications
Yukihiko OKUMURAKoichi KANAYAMA
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

The purpose of this research is to remove amorphous carbon from diamond film. We have utilized three methods, i.e., the heat treatment, the detection of optimal equivalence ratio, and the addition of hydrogen into synthesizing gas for making the high quality diamond film. These methods can remove and decrease the amorphous carbon effectively.

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© 2005 The Japan Society of Mechanical Engineers
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