The Proceedings of Conference of Kansai Branch
Online ISSN : 2424-2756
2006.81
Session ID : 720
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720 Evaluation of Elastic Modulus and Strength of SiN Thin Film Micro Elements
Kohji MINOSHIMA, Atsushi SUGETA, Masayuki SAKIHARA, Kei YAMASAKI
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© 2006 The Japan Society of Mechanical Engineers
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