Pages 249-250
Small size of linear driving devices with high accuracy and high stiffness are require for miniaturization of machine tools such as a micro-lathe. This paper describes traction characteristics of the linear driving device with a slider built-in two PZT elements. From the experiments on the characteristics, it was clarified that stable movements of the slider are obtained under low viscosity oil lubrication and traction force more than 5(N) of the slider is generated under slider guide pressure more than 140(kPa).