21715 Development of a Micro Shear Stress Sensor with a Hot Film Type : About the production process using SOI wafer

Abstract

In late years, micro sensor array to clarify minuteness structure of a flow is demanded as miniaturization of a measurement device advances. We develop micro shear stress sensor that it is for the measurement and control of a flow by this study. Based on silicon, we examine that production process of using metal film or semiconductor film of the micro sensors array. And we made that SOI wefer used micro shear stress sensor prototype in our clean room. We report the summary here.