Abstract
This paper presents a micro manipulation system with a force feedback ability. Operating such a system from a remote site typically suffers from transparency and time delay problem. Even a small time delay imposes difficulties on the operater, especially in force feedback. This problem is dealt with in this study by adopting a virtual model at the remote site. In order to generate a reasonable virtual model, we use actual SEM images from which a probe and an object to be handled are extracted and reconstructed as a virtual model through image processing.
