Abstract
Having a sense of contact is vital to do an interactive task against a workpiece surface. This study aims to extend our previous research to multi-DOF haptic feedback. We developed a new 3-DOF force sensor which can be installed inside a vacuum chamber of SEM. The force sensor enables one to feel a contact force at the tip of a probe in an arbitrary direction. The paper describes design details and characteristics of the force sensor alone and experimental results when the sensor is in contact with a test specimen inside the vacuum chamber.
