The Proceedings of Conference of Kanto Branch
Online ISSN : 2424-2691
ISSN-L : 2424-2691
2011.17
Session ID : 117102
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117102 Effects of Crystal Orientation on Martens Hardness of Single-Crystal Silicon in Nanoindentation(2^<nd> report)
Katsumi FUKUDAMitsuo KOBAYASHIAkira KAKUTAChika TAKAAZEMasashi SONADA
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Abstract
Recently, the devices have been progress miniaturization and ultra thin in kinds of fields, especially microelectronic devices and information storage media. Therefore, the measurement of near-surface is very difficult. However, their characteristics are very important in engineering. In this study, influence of phase transformation on mechanical properties of single crystal silicon is investigated. This paper describes how to write a manuscript.
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© 2011 The Japan Society of Mechanical Engineers
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