Abstract
Recently, many kinds of micro machine technologies have been improved day by day. Then tribological properties have become important problems. The purpose of this work was to reproduce a friction phenomena in micro scale order using diamond; the curvature radius of tip is 0.5[μm], 2[μm] and 5[μm], and synthetic silica wafer. The result shows, the friction coefficient depends on normal loads. Moreover, transition of friction mode ascribable to normal load.
