Abstract
Recently, micro systems as MEMS are researched for various applications. From the view point of cost efficiencies and space-saving, it is required that high accurate and compact manipulator be adopted. However, downsizing of the manipulator has problems, such as degradation of motor torque and rigidity. Accordingly, for solving these problems, we adopted a parallel link manipulator which can maintain a high rigidity, and the small actuator utilizing piezoelectric-actuator, called impact drive mechanism. The impact drive mechanisms are long stroke and high accuracy, but it is difficult to actuate in stable under specific condition. In this research, by modeling of parallel link manipulator, we investigated the relationship between the conditions of manipulator and the actuator.
