Abstract
This paper describes water hydraulic proportional flow regulating valve to control a water-driven linear stage at constant low speed for ultra-precision machining. To keep speed of the water-driven stage constant, it requires keeping flow rate through the valve constant even if the pressure difference across the valve changes by a fluctuation of supply pressure or a load to the stage. Therefore, a pressure-compensation valve and an invariable restrictor are connected to the upstream of an electromagnetic proportional valve in series. Characteristics of the electromagnetic proportional valve and pressure-flow characteristics of the invariable restrictor were measured and they were included hi the mathematical model. The static characteristics of the valve were measured and compared with the simulation results, then validity of the design was examined.
