Double sided exposure to the hollow cylinder substrate by the exposure from the plural directions

Abstract

Miniaturization and high performance of robots familiar with MEMS technology can be achieved. The aim of this study was to investigate the expose both sides of a hollow cylindrical substrate. The principle only the point where light irradiated from the many directions crossed with one point is exposed. In the simulation calculation, we observe the path of light by using light as a linear equation. We used calculation software called Mathematica for calculation. The results of simulation demonstrated that the path of light was seen. This investigation has revealed that it can be inferred how the light diffuses, and where position the exposure is the best. Based on the simulation results, both sides of the hollow cylindrical substrate are exposed and evaluated. As a result, it was confirmed that double-side exposure to a hollow cylindrical substrate was possible. We will increase the number of exposure directions in the future.