2023.29
Session ID : 17D08
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 16, 2023 - March 17, 2023
Study on Visualization of Cleaning Phenomena in Nano-scale by Evanescent Field
(Instantaneous Physical Evidence of Nano-Particle Detachment by Ultrasonic)
*Yutaka TERAYAMA, Panart KHAJORNRUNGRUANG, Keisuke SUZUKI, Hibiki FUJISHIMA, Satomi HAMADA, Yutaka WADA, Hirokuni HIYAMA
Author information
Keywords:
megasonic cleaning,
nanoscale visualization,
Au nano-particle,
detachment,
silica glass substrate,
evanescent field,
dark field,
wet condition
Details
