The Proceedings of Conference of Kyushu Branch
Online ISSN : 2424-2780
2001
Session ID : 116
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116 Ultra Thin Processing of Hard and Brittle Materials
Toshihiro YAMASHITA, Mutsumi TOUGE, Junji WATANABE, Yoshifumi OHBUCHI, Noboru UEDA
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Keywords: quartz, lapping process, polishing process, protective plating, optical contact method
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© 2001 The Japan Society of Mechanical Engineers
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