The Proceedings of Conference of Kyushu Branch
Online ISSN : 2424-2780
2012.65
Session ID : 411
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411 In-Plane Thermal Conductivity and Electrical Conductivity Measurements of Silicon Thin Film
Harutoshi HAGINO, Yosuke KAWAHARA, Aimi GOTO, Toru HIWADA, Koji Miyazaki
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Keywords: Thermal Conductivity, Electrical Conductivity, Silicon, MEMS
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© 2012 The Japan Society of Mechanical Engineers
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