The Proceedings of Conference of Kyushu Branch
Online ISSN : 2424-2780
2014
Session ID : 4E4
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4E4 Developments of metal-containing carbon films by RF magnetron sputtering method
Hiroyuki HasegawaYasunari WATANABETomohiro Oosaki
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© 2014 The Japan Society of Mechanical Engineers
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