The Proceedings of Conference of Kyushu Branch
Online ISSN : 2424-2780
2016.69
Session ID : A-02
Conference information
A-02 Study on Laser Surface Processing on Semiconductor with sub-picosecond Excitation by using Femtosecond Double Pulse Beam
Yusuke UCHIYAMA, Terutake HAYASHI, Keigo MATSUNAGA, Chengwu WANG, Yoji MATSUKAWA, Syuhei KUROKAWA
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Keywords: Laser Processing, Femtosecond Pulse Beam, Double Pulse Beam, Surface Excitation
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© 2016 The Japan Society of Mechanical Engineers
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