2017.70
Session ID : 906
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 14, 2017 -
Study on Femtosecond Laser Processing to Semiconductor Surface with Instant Surface Excitation by using Double Pulse Beam (3rd report)
*Hideaki YOKOO, Terutake HAYASHI, Shuhei KUROKAWA, Keigo MATSUNAGA, Yoji MATSUKAWA
Author information
Details
Article 1st page
