2021.74
Session ID : F43
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 10, 2021
P-CVM / CMP fusion processing of CVD polycrystalline SiC with ELID grinding for preprocessing
*Shuhei OKOGE, Syuhei KUROKAWA, Terutake HAYASHI, Akihiro ORI, Hitoshi OMORI, Yoshihiro UEHARA
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