2022.75
Session ID : H17
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 09, 2022
Clarification of Polishing Mechanism Focusing on Abrasive Particle Behavior in CMP
-Investigation of the Abbott Firestone curve of pads with different polishing rates and proposal of a polishing model-
*Syuntaro HAYASHI, Syuhei KUROKAWA, Terutake HAYASHI, Hirokuni HIYAMA, Yutaka WADA, Naoyuki HANDA
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