Abstract
Pt/C multilayer film with d-spacing of about 4nm and 30 bilayers has been deposited by the ion beam sputtering process on commercially available 4-inch Si wafer substrates. The x-ray reflectivity of the fabricated film was evaluated using the W-Lα x-ray (λ=0.148nm) with the incident angle 0∿2.5 deg. The reflectivity of the first Bragg peak was 58.2%, which was 87.8% of calculated optimum value. The interface roughness of the multilayers derived from the x-ray measurement was 0.229nm rms. High-resolution transmission electron microscope observations and selected area electron diffraction studies indicate that the multilayer consists of amorphous carbon layers and polycrystalline platinum layers. The microscope observation showed the interface roughness of Pt/C multilayers were mainly originated in the size and alignment of the Pt crystallites.
