Abstract
Fine silica abrasives wheel by electrophoretic deposition phenomenon, EPD pellet, was fabricated and applied to mirror grinding of 3 inches quartz-crystal wafers for the purpose of evaluating the grinding performance. Then. EPD pellets made a mirror surface and the final roughness was 6.5nmRy. The time required for making the mirror surface was less than 10min. No residual strain was found on the ground surface.
