Precision Grinding of Micro Array Lens Molding Die with 4-axes Controlled Micro Wheel(Ultra-precision machining)

Abstract

This paper deals with precision grinding of micro lens array (fly eye) by using a resinoid bonded diamond wheel. An ultra-precision grinding system of micro lens array was developed. In this system, a resinoid bonded diamond wheel was 4-dimentionally controlled with 1nm resolution by linear scale feedback system and scanned on the workpiece surface. New truing method of resinoid bonded diamond wheel by using a vanadium alloy truing tool was developed and its performance was obtained high preciseness and high truing rate. Finally, the micro lens array molding dies of a fine grain tungsten carbide were tested the resinoid bonded diamond wheel to evaluate grinding performance.