Sub-aperture Approaches for Precision Polishing and Metrology(Surface and edge finishing)

Abstract

This paper will briefly review Magnetorheological Finishing (MRF^[○!R]), a deterministic sub-aperture polishing method that has been developed to overcome many of the fundamental limitations of traditional finishing, and will discuss the Subaperture Stitching Interferometer (SSI^[○!R]) as a production-ready, metrology system, enabling cost effective manufacturing of precision optical surfaces. A summary of QED Technologies' latest developments in the field of high-precision subaperture polishing and metrology will be presented.