The Development of Moving Rail Type Aerostatic Positioning Table for High Vacuum Equipment(Precision positioning and control technology)

Abstract

With high integration of a semiconductor, development of ultra-precision positioning table system used for high vacuum equipment is needed. Technology to realize the ultra-precision positioning table system is adoption of aerostatic bearings to guide elements. However there are many problems for aerostatic bearings for high vacuum equipment. Therefore, with the aim of developing the future positioning table system for high vacuum equipment, the moving rail type aerostatic positioning table with the differential pumping seal, which is based on a new design concept and desirable structural configuration, has been developed. The paper presents a structural configuration of the developed aerostatic positioning table and the performance evaluation in high vacuum environment.