Abstract
Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.
