Abstract
Micro-machining employing micro-tools several tens of micrometers in diameter has attracted attention as a new machining technology that adds high value to various fields including optoelectronics, medical science, etc. In order to perform the machine work with sufficient accuracy, the position of the micro-tool tip must be detected accurately. In the case in which the gap between the tip of a micro-tool and a workpiece is approximately 1μm, the light intensity varies sharply with gap distance. The degrees of precision obtained in sets of repetitive measurements performed for position detection using the sharp variation in light intensity were σ≦0.048μm.
