Abstract
The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.
