Abstract
This paper describes a design guideline of multi-axis alignment stage for micro-objects, which have a size in the order of 100 micro meters, by using a board stage that is vibrated in the natural frequencies of various vibration modes. Since it is difficult to grip and to manipulate micro-objects, a simple and reliable method is desired. It is shown that the design concept and guideline to realize this stage. Beside the theoretical representation, an example stage is designed for aligning micro-objects. It was also analyzed by FEM simulation. In addition, the designed vibration stage was fabricated using a stainless steel thin plate. Experimental results were discussed with both the theoretical results from the design guideline and the simulation results.
