B002 Construction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection

Abstract

The nanopipette ball probe is introduced for measuring three dimensional forms of micrometric structures. The shaft of the probe is made of glass pipette which has low Young's modulus in order not to damage the measurement object, and a micro glass ball is fixed to the tip of the shaft to measure in all directions. In addition, shear-force detection has been applied to detect approach of measurement object with low measuring force. In this paper, the basic property of the probe is evaluated, and dimensional form measurement is demonstrated by using the probe.