Abstract
In laser cutting and drilling process, molten material was scattered as spatters, which deteriorate the surface integrity of workpiece due to the thermal damage. It is expected that the control of assist gas flow can reduce the adhesion of spatter. In order to investigate the improvement method of thermal damage due to the adhesion of spatter, it is required to clarify characteristics of spatters. Therefore, the collection and the analyzing method of spatters with high-speed video cameras in the laser micro-drilling were developed, and characteristics of spatter movement were numerically investigated by CFD analysis.