Abstract
A new structural design of a micro electro mechanical system (MEMS) device for straightness measurement with the three point method has been studied. This device integrates three cantilever displacement sensors with a 5mm pitch on a silicon chip. To improve sensitivity and channel separation, some structural designs to make stress concentration part and to reduce interference between each displacement sensor were investigated using a finite element method code. Based on the calculation results, an integrated model was designed; in this model, each cantilever has a cutting off part and a groove near the base and notches were added to the support base. It was confirmed that integrated model has the feasibility to improve both sensitivity and channel separation.
