Abstract
A new on-machine measurement system using ultraprecision machine tool has been developed. The real-time monitoring system can acquire 3-axis position signals of the machine tool in 10 nm resolution using additional electrical circuits which are connected between a personal computer and 3 linear scale sensors of ultrahigh precision machine tool. A 10nm resolution optical fiber-type position sensor with a small air slide and ruby stylus settled on the system for on-machine profile measurement. Experiments of on-machine profile measurement are performed using ultraprecision machined nonsymmetrical optical surface. Furthermore, the system was applied in an accuracy verification experiment of an XZC 3-axis simultaneous ultraprecision lathing process for nonaxisymmetric aspheric optics. A result of the experiment leads that a delay of the position control of linear axis Z mainly causes the surface profile deviation of machined surface.
