Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2017.9
Session ID : 027
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Detection Principle and Verification of Non-contact Displacement Meter with Pico-meter Resolution
Hideaki TAMIYAKayoko TANIGUCHIKazuo YAMAZAKIHideki AOYAMA
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Abstract

Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

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© 2017 The Japan Society of Mechanical Engineers
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