Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2017.9
Session ID : 079
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A confocal microscope with a mode-locked laser source
Yuki SHIMIZUTaku NAKAMURAYuan-Liu CHENWei GAO
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Abstract

An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the national standard of frequency and time, the proposed chromatic confocal microscope is expected to achieve a high axial resolution. In this paper, as a first step of research, design study on the optical setup for the prototype chromatic confocal microscope with the mode-locked laser is carried out.

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© 2017 The Japan Society of Mechanical Engineers
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