Fabrication of Micro-oscillator by Printing technologies of Au thin film and graphene oxide

Abstract

This present study is intended to show some test results of fabrication of micro-oscillators by transfer-printing (TP) of Au thin film and inkjet printing of graphene oxide (GO) nanoparticles. Au thin film is formed into a double-supported micro-beam to function as a micro-oscillator on a polymer substrate. Au thin film is also fabricated on a pre-coated Au substrate by atomic diffusion bonding assisted transfer-printing. This micro-oscillator can be driven by electrostatic force with 90 – 210 V of applied voltage and less than 10 kHz. The resonance frequency is 0.28 kHz. GO nanoparticles are deposited on the transfer-printed Au thin film by inkjet printing. The laminated thin film of Au and GO nanoparticles has higher modulus than that of Au thin film.