Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces

Abstract

A prototype of a biaxial positioning table with flexible support and magnetic attraction force control was developed. Because rigidity is assured and sliding friction is eliminated, the kinematic accuracy is high, and high-precision positioning is achieved. The total displacement in the long-stroke feed was 340 μm and 160 μm (X-axis and Y-axis), and the step displacement in the high-resolution feed was 85 nm and 40 nm, respectively. Experiments were conducted with cooperative positioning, in which both long-stroke and high-resolution displacements were output continuously. As a result, the displacements were almost the same as those obtained when each output was obtained independently. It was confirmed that cooperative positioning is effective.