Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 14, 2021 - November 18, 2021
A new device for straightness measurement which integrate 10 cantilever displacement sensors has been proposed. This device was designed to measure the waviness smaller than 100 μm in height. Ten cantilevers of 11mm length were fabricated in parallel with 1.8mm pitch in a side of the base substrate of 20 mm square. The strain, induced by a displacement of the probe placed near the front edge of the cantilever, is detected as a change in the resistance of the piezo resistor at the root of the cantilever. A prototype was investigated and it was found that the resistance value increases in proportion to the displacement of the probe. Hence, it was confirmed that this device has the basic ability of displacement detection.
