ミニマルファブのための1インチサイズHiPIMSプラズマ源(<小特集>プラズマ応用技術の新展開)

Journal of the Society of Mechanical Engineers

Online ISSN : 2424-2675
ISSN-L : 0021-4728

1 Inch-sized HiPIMS Glow Plasma Source for "Minimal Fab Manufacturing System"

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2014 Volume 117 Issue 1148 Pages 467-469

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