Precision Manufacturing Techniques for Very Large Scale Integrated Circuit

Journal of the Society of Mechanical Engineers

Online ISSN : 2424-2675
ISSN-L : 0021-4728

Precision Manufacturing Techniques for Very Large Scale Integrated Circuit

Seiya HASHIMOTO

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1980 Volume 83 Issue 734 Pages 70-76

DOI https://doi.org/10.1299/jsmemag.83.734_70

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© 1980 The Japan Society of Mechanical Engineers

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