Thermal and Gas Dynamic problems in the Semiconductor Fabrication processes

Journal of the Society of Mechanical Engineers

Online ISSN : 2424-2675
ISSN-L : 0021-4728

Thermal and Gas Dynamic problems in the Semiconductor Fabrication processes

Satomi KOBAYASHI, Toshiki IINO, Jun'ichi KOBAYASHI, Takuji TORII

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Keywords: Fluid Mechanics, Thermal Radiation, Semiconductor, Natural Convection Thin Film, Etching, Cleam Room, Particle, Contamination Control

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1987 Volume 90 Issue 818 Pages 112-117

DOI https://doi.org/10.1299/jsmemag.90.818_112

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© 1987 The Japan Society of Mechanical Engineers

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