Abstract
In this study, a novel peristaltic micro pump using bimorph type PZT elements is proposed. There are two types such as single side type and double side type in the proposed pump. The pumping of liquid is realized by peristaltic motion of metal film with controlling driving voltage of 5 bimorph-type PZT elements that are laid on the metal film. In this paper, the peristaltic micro pump (20mm×20mm×2mm) is fabricated to verify the pumping principle and to examine the characteristics. Intermittent sinusoid driving method for PZT element is proposed to advance the pumping characteristics. The maximum output flow rate of 250mm^3/min is obtained and the maximum load pressure of 3.1kPa is obtained.
