Abstract
In this study, a precision stage constructed of the electromagnetic actuator using the rubber film has been developed. We have proposed the hybrid rubber-electromagnetic actuator (RE actuator), and have the following features. (1) Viscous damping is essentially obtained by rubber. (2) The actuator functions also as flexible joint. (3) Since there is no sliding guide, precise positioning can be performed. As an application of this actuator, the XYZ precision stage has been made. The feature of this stage is that it can be driven in the XYZ direction in spite of monolithic structure. And it is also one of the features that residual vibration does not occur after positioning. Fundamental properties of the stage are investigated, and experimental data demonstrate 20 nanometer positioning and illustrate tracking a spiral orbit.
