Abstract
The pull-off force and friction force were measured by using AFM with various curvature radius of a spherical probe in air under the relative humidity controlled. The curvature radii were 9 μm. The tests were performed with single-crystalline <111> silicon and two super-water-repellent coating films by the sol-gel method. Pull-off force and friction force of silicon increased with increasing relative humidity. On the contrary, those of super-water-repellent coating film with large contact angle was independent of relative humidity. From these results, it is found that the influence of the meniscus force by the adsorbed water on the pull-off force and friction force is reduced with the super-water-repellent coating film.
