The Proceedings of the Machine Design and Tribology Division meeting in JSME
Online ISSN : 2424-3051
2002.2
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Micro Systems (Micromachines, MEMS/MOEMS) and their Applications
Mikio HORIE
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Keywords: Micro systems, Micromachines, MEMS (Micro electro mechanical systems), MOEMS (Micro opto electro mechanical systems), Robotics, Large-deflective hinge, Pantograph mechanism, Three-dimensional micromechanism, Motion convert mechanism, Surface mount system
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Pages 7-12

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Abstract
In the present invited paper, the activities of my recent research in the fields of micro systems, i. e., miniature mechanisms, micro mechanisms, and nano-meter-order manufacturing are reported, especially, concerning (1) Micro bonding system, (2) Micro mechanism and its element manufactured by Reactance Ion Etching (RIE), (3) Palmtop surface mount system for micro devices, (4) Positioning-and-orientation miniature mechanism with large-deflective hinges, (5) Fast Atom Beam (FAB) process and its applications, etc.
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© 2002 The Japan Society of Mechanical Engineers
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