Abstract
This paper describes the current status and future works of micro robots factory. For the latest demand of micro production, the miniaturized mechanical system such micro-mechatronics and instruments is the one of key technologies for providing several micro parts with a higher accuracy. Although it is known that the new technology of molecular machine has the great benefit to change the industries as well as human lives, the micro mechanical system ranging a few milimeters is still important to realize the reliable productivity. For these years, an unique micro robots system which is organized many tiny robots with tools and sensors has been developed. In our group, the small robots that are composed of the piezo elements and the electromagnets for providing the accurate inch worm locomotion, are employed as the base motion mechanism and several unique micro tools have been implemented on them. In the experiments, several actual applications such micro machining, bio cell operating as well as surface defect detecting are demonstrated.
