Abstract
In this paper, we have investigated the pull-off forces between the surfaces having periodic asperity array. First, an FIB (focused ion beam) was used to create periodic asperity array on each surface on glass sphere glued on cantilever tip and silicon wafer. Then the pull-off force on the silicon asperity was measured by using the glass sphere with/without asperity array. The results showed that the pull-off force was decreased by applying the asperity array to both silicon and glass surfaces than applying on only the silicon surface. The pull-off forces changed when shifting the relative angle between each periodic asperity array.
