The Proceedings of the Machine Design and Tribology Division meeting in JSME
Online ISSN : 2424-3051
2004.4
Session ID : 119
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A Plate-type Micro Diaphragm Pump Driven by Electro-Conjugate Fluid
Shinichi YokotaKouichi TaniguchiKenjiro TakemuraKazuya Edamura
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Abstract
An electro-conjugate fluid (ECF), which generates powerful jet flow under high voltage supply, is a kind of functional fluids. The fluid is suitable for micro actuation. In this study, we develop a new type of plate-type micro diaphragm pump driven by ECF. We propose the driving principle of the micro pump, and fabricate a prototype of the pump. The Experimental results confirm the usability of the micro pump.
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© 2004 The Japan Society of Mechanical Engineers
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