Abstract
In a machine design, a carbon system thin film is beginning to be used from a viewpoint of the cost reduction by the formation of a long-life life. However, coatings hardness and the relation of cost were not considered. This is considered to be for the hardness of a thin film to be dependent on coating equipment and the coating method. Then, in this research, the hardness of a carbon system hard thin film and the relation of cost are proposed as a new view. The conventional coating method of the CN_X (amorphous Carbon Nitride) film expected as a hard thin film was improved from the cost side, and the thin film which has hardness equivalent to the former was created.
