Abstract
LIGA (German acronym for Lithographite Galvanoformung and Abforraung) process, that utilizes a useful industrial application of synchrotron radiation (SR), is one of the promising technologies for fabrication of extremely tall three-dimensional (3D) microstructures with a large aspect ratio. This process leads to application of raicro-nano fabrication technology. As research and development in various fields such as micro-mechanics, micro-optics, sensor, actuator are promoted. Furthermore, the demands for micro devices produced by IT, chemical, medical, and biological technologies will be greatly increased. Focusing on the economical mass production on the micro devices, precision plastic reproduction techniques such as hot embossing and injection molding are essential techniques. This paper describes recent advantages and prospects of raicro-nano systems composed by these micro devices and its fabrication.
